Modeling and analysis of equipment managers in manufacturing execution systems for semiconductor packaging

Fan Tien Cheng, Haw Ching Yang, Tsung Liang Kuo, Chengche Feng, Mu Der Jeng

研究成果: Article

22 引文 斯高帕斯(Scopus)


Equipment Managers (EMs) play a major role in a Manufacturing Execution System (MES). They serve as the communication bridge between the components of an MES and the equipment. The purpose of this paper is to propose a novel methodology for developing analytical and simulation models for the EM such that the validity and performance of the EM can be evaluated. Domain knowledge and requirements are collected from a real semiconductor packaging factory. By using IDEFO and state diagrams, a static functional model and a dynamic state model of the EM are built. Next, these two models are translated into a Petri net model. This allows qualitative and quantitative analyses of the system. The EM net model is then expanded into the MES net model. Therefore, the performance of an EM in the MES environment can be evaluated. These evaluation results are good references for design and decision making.

頁(從 - 到)772-782
期刊IEEE Transactions on Systems, Man, and Cybernetics, Part B: Cybernetics
出版狀態Published - 2000 十月 1


All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Software
  • Information Systems
  • Human-Computer Interaction
  • Computer Science Applications
  • Electrical and Electronic Engineering