Modeling and characterization of micromachined bi-directional electro-thermal vibromotors

Wen Pin Shih, Minfan Pai, Yu Yun Lin, Chung Yuen Hui, Norman C. Tien

研究成果: Conference contribution

摘要

The motion of a micromachined bi-directional electro-thermal vibromotor (BETV) is analyzed using an impact model which takes into account of friction and contact, as well as the compliance of the slider and the impact head. This model is shown to address several important issues on the reliable usage of BETV. These include (a) how to achieve the push or pull mode (b) avoiding multiple impacts in one actuation cycle (c) the existence of periodic solution with the same period as the thermal actuator. To test our theory, we fabricated and conducted experiments on several BETV with different geometries. Preliminary results showed good agreement between theory and experiments.

原文English
主出版物標題Micro-Electro-Mechanical Systems (MEMS) - 2003
發行者American Society of Mechanical Engineers
頁面709-716
頁數8
ISBN(列印)0791837211, 9780791837214
DOIs
出版狀態Published - 2003
事件2003 ASME International Mechanical Engineering Congress - Washington, DC, United States
持續時間: 2003 十一月 152003 十一月 21

出版系列

名字American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)
5

Other

Other2003 ASME International Mechanical Engineering Congress
國家United States
城市Washington, DC
期間03-11-1503-11-21

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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