Modeling of heat transfer for laser-assisted direct nano imprint processing

Fei Bin Hsiao, Di Bao Wang, Chun Ping Jen, Hui Ju Hsu, Cheng Hsin Chuang, Yung-Chun Lee, Chuan-Pu Liu

研究成果: Conference contribution

1 引文 斯高帕斯(Scopus)

摘要

The melting duration and molten depth are key information for Laser-Assisted Direct Imprinting, which raises issues about the melting & solidification induced by excimer-pulse-laser irradiating through unilaterally transparent binary materials. Considering the size-effect on thermal conductivity and phase-change of irradiated material, the thermal-contact resistance is taken into account to simulate and predict the melting behavior for this process. Results in this study indicate that the laser-annealing case as well as the perfect-contact case provides the upper-bound and the lower-bound values for the physical quantities involved in this process even without the detail information of the changing values of thermal-contact resistance.

原文English
主出版物標題2005 IEEE International Conference on Robotics and Biomimetics, ROBIO
頁面747-751
頁數5
出版狀態Published - 2005 12月 1
事件2005 IEEE International Conference on Robotics and Biomimetics, ROBIO - Shatin, N.T., China
持續時間: 2005 7月 52005 7月 9

出版系列

名字2005 IEEE International Conference on Robotics and Biomimetics, ROBIO
2005

Other

Other2005 IEEE International Conference on Robotics and Biomimetics, ROBIO
國家/地區China
城市Shatin, N.T.
期間05-07-0505-07-09

All Science Journal Classification (ASJC) codes

  • 工程 (全部)

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