Modeling of heat transfer for laser-assisted direct nano imprint processing

Fei Bin Hsiao, Di Bao Wang, Chun Ping Jen, Hui Ju Hsu, Cheng Hsin Chuang, Yung-Chun Lee, Chuan-Pu Liu

研究成果: Conference contribution

1 引文 (Scopus)

摘要

The melting duration and molten depth are key information for Laser-Assisted Direct Imprinting, which raises issues about the melting & solidification induced by excimer-pulse-laser irradiating through unilaterally transparent binary materials. Considering the size-effect on thermal conductivity and phase-change of irradiated material, the thermal-contact resistance is taken into account to simulate and predict the melting behavior for this process. Results in this study indicate that the laser-annealing case as well as the perfect-contact case provides the upper-bound and the lower-bound values for the physical quantities involved in this process even without the detail information of the changing values of thermal-contact resistance.

原文English
主出版物標題2005 IEEE International Conference on Robotics and Biomimetics, ROBIO
頁面747-751
頁數5
出版狀態Published - 2005 十二月 1
事件2005 IEEE International Conference on Robotics and Biomimetics, ROBIO - Shatin, N.T., China
持續時間: 2005 七月 52005 七月 9

出版系列

名字2005 IEEE International Conference on Robotics and Biomimetics, ROBIO
2005

Other

Other2005 IEEE International Conference on Robotics and Biomimetics, ROBIO
國家China
城市Shatin, N.T.
期間05-07-0505-07-09

指紋

Melting
Contact resistance
Heat transfer
Lasers
Processing
Solidification
Molten materials
Laser pulses
Thermal conductivity
Annealing
Hot Temperature

All Science Journal Classification (ASJC) codes

  • Engineering(all)

引用此文

Hsiao, F. B., Wang, D. B., Jen, C. P., Hsu, H. J., Chuang, C. H., Lee, Y-C., & Liu, C-P. (2005). Modeling of heat transfer for laser-assisted direct nano imprint processing. 於 2005 IEEE International Conference on Robotics and Biomimetics, ROBIO (頁 747-751). [1708840] (2005 IEEE International Conference on Robotics and Biomimetics, ROBIO; 卷 2005).
Hsiao, Fei Bin ; Wang, Di Bao ; Jen, Chun Ping ; Hsu, Hui Ju ; Chuang, Cheng Hsin ; Lee, Yung-Chun ; Liu, Chuan-Pu. / Modeling of heat transfer for laser-assisted direct nano imprint processing. 2005 IEEE International Conference on Robotics and Biomimetics, ROBIO. 2005. 頁 747-751 (2005 IEEE International Conference on Robotics and Biomimetics, ROBIO).
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abstract = "The melting duration and molten depth are key information for Laser-Assisted Direct Imprinting, which raises issues about the melting & solidification induced by excimer-pulse-laser irradiating through unilaterally transparent binary materials. Considering the size-effect on thermal conductivity and phase-change of irradiated material, the thermal-contact resistance is taken into account to simulate and predict the melting behavior for this process. Results in this study indicate that the laser-annealing case as well as the perfect-contact case provides the upper-bound and the lower-bound values for the physical quantities involved in this process even without the detail information of the changing values of thermal-contact resistance.",
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Hsiao, FB, Wang, DB, Jen, CP, Hsu, HJ, Chuang, CH, Lee, Y-C & Liu, C-P 2005, Modeling of heat transfer for laser-assisted direct nano imprint processing. 於 2005 IEEE International Conference on Robotics and Biomimetics, ROBIO., 1708840, 2005 IEEE International Conference on Robotics and Biomimetics, ROBIO, 卷 2005, 頁 747-751, 2005 IEEE International Conference on Robotics and Biomimetics, ROBIO, Shatin, N.T., China, 05-07-05.

Modeling of heat transfer for laser-assisted direct nano imprint processing. / Hsiao, Fei Bin; Wang, Di Bao; Jen, Chun Ping; Hsu, Hui Ju; Chuang, Cheng Hsin; Lee, Yung-Chun; Liu, Chuan-Pu.

2005 IEEE International Conference on Robotics and Biomimetics, ROBIO. 2005. p. 747-751 1708840 (2005 IEEE International Conference on Robotics and Biomimetics, ROBIO; 卷 2005).

研究成果: Conference contribution

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AU - Liu, Chuan-Pu

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AB - The melting duration and molten depth are key information for Laser-Assisted Direct Imprinting, which raises issues about the melting & solidification induced by excimer-pulse-laser irradiating through unilaterally transparent binary materials. Considering the size-effect on thermal conductivity and phase-change of irradiated material, the thermal-contact resistance is taken into account to simulate and predict the melting behavior for this process. Results in this study indicate that the laser-annealing case as well as the perfect-contact case provides the upper-bound and the lower-bound values for the physical quantities involved in this process even without the detail information of the changing values of thermal-contact resistance.

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Hsiao FB, Wang DB, Jen CP, Hsu HJ, Chuang CH, Lee Y-C 等. Modeling of heat transfer for laser-assisted direct nano imprint processing. 於 2005 IEEE International Conference on Robotics and Biomimetics, ROBIO. 2005. p. 747-751. 1708840. (2005 IEEE International Conference on Robotics and Biomimetics, ROBIO).