Modular design and analysis of plasma-driven system with integrated resonant circuit and capacity expansion mechanism

The study proposes a modular design of plasma-driven system with an integrated resonant circuit and regulation mechanism. This design is developed to increase the expansion capability of plasma-driven systems. In the study, step-up transformers are combined with resonant circuits as a hybrid resonant tank, which is then augmented with plasma loads as a module to provide expandable capacities for a system. Analysis of resonant circuit and connected modules is performed to find design parameters. Feedback voltage control and asymmetric pulse width modulation are meanwhile applied to stabilize the system and regulate the plasma generation. To validate this proposed method, the circuit hardware realization has been completed under different scenarios. Test results indicate that this proposed system produces a higher concentration of plasma with an expanded capacity, supporting the feasibility and practicality for plasma industry applications.