@article{87e279b2090e42cc958abf2ef699e186,
title = "Monolithic 3D CMOS Using Layered Semiconductors",
author = "Sachid, {Angada B.} and Mahmut Tosun and Desai, {Sujay B.} and Hsu, {Ching Yi} and Lien, {Der Hsien} and Madhvapathy, {Surabhi R.} and Chen, {Yu Ze} and Mark Hettick and Kang, {Jeong Seuk} and Yuping Zeng and He, {Jr Hau} and Chang, {Edward Yi} and Chueh, {Yu Lun} and Ali Javey and Chenming Hu",
note = "Funding Information: Acknowledgements: A.B.S. and M.T. contributed equally to this work. A.B.S. and C.H. conceived the idea. A.B.S., M.T., and A.J. formulated the fabrication fl ow. A.B.S., M.T., S.B.D., C.-Y.H., D.-H.L., S.R.M., M.H., J.S.K., and Y.Z. fabricated the devices. A.B.S. and M.T. performed electrical measurements. A.B.S. analyzed the data. Y.-Z.C. and Y.-L.C. did transmission electron microscopy. All the authors were involved in preparing the manuscript. A.B.S. was funded by Applied Materials, Inc. and Entegris, Inc. under the I-RiCE Program. M.T. was funded by the Director, Office of Science, Office of Basic Energy Sciences, and Materials Sciences and Engineering Division of the U.S. Department of Energy under Contract No. DE-AC02-05Ch11231.",
year = "2016",
month = apr,
doi = "10.1002/adma.201505113",
language = "English",
volume = "28",
pages = "2547--2554",
journal = "Advanced Materials",
issn = "0935-9648",
publisher = "Wiley-VCH Verlag",
number = "13",
}