Multi-gas sensor and metod of fabricating the sensor

貢獻的翻譯標題: 多重氣體感測器及其製作方法

Huey-Ing Chen (Inventor), Wen-Chau Liu (Inventor)

研究成果: Patent

摘要

The present invention is a multi-gas sensor and a method for fabricating the multi-gas sensor. The multi-gas sensor comprises a substrate, an epitaxial layer, a metal oxide layer, a first metal layer, a second metal layer and multiple third metal layers. The method for fabricating the multi-gas sensor comprises steps of forming an epitaxial layer on a substrate; etching the epitaxial layer to form a first epitaxial structure and a second epitaxial structure a fixed distance from the first epitaxial structure; forming a metal oxide layer
貢獻的翻譯標題多重氣體感測器及其製作方法
原文English
專利號8330169
出版狀態Published - 1800

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