Multivariate simulation assessment for virtual metrology

Yeh Tung Chen, Haw Ching Yang, Fan Tien Cheng

研究成果: Conference contribution

18 引文 斯高帕斯(Scopus)

摘要

To reduce cost, this paper proposes a system architecture to simulate and assess the multivariate of equipment properties. The architecture integrates the Monte Carlo simulation, the Neural Network model and the sensitivity analysis to construct a virtual metrology system. By assuming the property's probability distribution, the architecture generates the extreme input data to supplement the actual data for enhancing the model accuracy and estimating the property trend. An industrial case applied to validate the proposed system architecture.

原文English
主出版物標題Proceedings 2006 IEEE International Conference on Robotics and Automation, ICRA 2006
頁面1048-1053
頁數6
DOIs
出版狀態Published - 2006
事件2006 IEEE International Conference on Robotics and Automation, ICRA 2006 - Orlando, FL, United States
持續時間: 2006 5月 152006 5月 19

出版系列

名字Proceedings - IEEE International Conference on Robotics and Automation
2006
ISSN(列印)1050-4729

Other

Other2006 IEEE International Conference on Robotics and Automation, ICRA 2006
國家/地區United States
城市Orlando, FL
期間06-05-1506-05-19

All Science Journal Classification (ASJC) codes

  • 軟體
  • 控制與系統工程
  • 人工智慧
  • 電氣與電子工程

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