Nano-carbon nitride synthesis from a bio-molecular target for ion beam sputtering at low temperature

J. J. Wu, T. R. Lu, C. T. Wu, T. Y. Wang, L. C. Chen, K. H. Chen, C. T. Kuo, T. M. Chen, Y. C. Yu, C. W. Wang, E. K. Lin

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24 引文 斯高帕斯(Scopus)


Nano-crystalline carbon nitride has been successfully synthesized at a temperature below 100 °C from an adenine(C5N5H5) target sputtered by an Ar ion beam. Because adenine possesses a ring structure similar to the hypothetical β-C3N4 phase, the use of this bio-molecular compound as the target is believed to reduce the energy barrier of carbon-nitride growth. The effect of Ar ion-sputtering voltage on the film growth and the effect of extra-N-atom incorporation on the carbon-nitride film growth are examined in this study. Only a carbon film is formed with an ion energy of 500 V. For the ion-beam energy above 750 V, carbon nitride films are deposited, and there is some hydrogen incorporation in the films. The N/C composition ratio in the films could reach 1:1 and is independent on the ion beam voltage. The nitrogen is bonded with carbon within the films, as determined by the IR and XPS measurements. However, the films deposited at a higher ion voltage could possess some original functional groups of adenine. A strong and broad peak at a d-spacing of 0.32 nm, comparable to the calculated d-spacing of the β-C3N4(110), is observed in the XRD spectra of the carbon nitride films. The TEM results indicated that the film contained nano-crystalline grains. Several d values are also in good agreement with those of adenine and the calculated values of β-C3N4. The C/N ratios of the films are still kept at almost 1:1 with N atoms added during deposition. The XRD spectra and IR spectra of these films are all similar to the film deposited without nitrogen source.

頁(從 - 到)605-609
期刊Diamond and Related Materials
出版狀態Published - 1999 三月

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Materials Chemistry
  • Electrical and Electronic Engineering

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