Nanoscale imaging of buried structures with elemental specificity using resonant X-ray diffraction microscopy

Changyong Song, Raymond Bergstrom, Damien Ramunno-Johnson, Huaidong Jiang, David Paterson, Martin D. De Jonge, Ian McNulty, Jooyoung Lee, Kang L. Wang, Jianwei Miao

研究成果: Article同行評審

59 引文 斯高帕斯(Scopus)

摘要

We report the first demonstration of resonant x-ray diffraction microscopy for element specific imaging of buried structures with a pixel resolution of ∼15nm by exploiting the abrupt change in the scattering cross section near electronic resonances. We performed nondestructive and quantitative imaging of buried Bi structures inside a Si crystal by directly phasing coherent x-ray diffraction patterns acquired below and above the Bi M5 edge. We anticipate that resonant x-ray diffraction microscopy will be applied to element and chemical state specific imaging of a broad range of systems including magnetic materials, semiconductors, organic materials, biominerals, and biological specimens.

原文English
文章編號025504
期刊Physical review letters
100
發行號2
DOIs
出版狀態Published - 2008 一月 18

All Science Journal Classification (ASJC) codes

  • 物理與天文學 (全部)

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