Nanoscaled C, Ni, Pt thin films

Wan Yu Wu, Chia Wei Hsu, Jyh Ming Ting

研究成果: Article同行評審

3 引文 斯高帕斯(Scopus)

摘要

We have investigated the growth and characteristics of nanoscaled thin films of carbon, nickel, and platinum. The nanoscaled thin films were deposited on Si and quartz substrates with or without a surface layer of carbon, nickel, or platinum using a DC magnetron sputter deposition technique. The thicknesses, which were determined using ellipsometry, are all less than 10 nm. The film structures were examined using glazing angle incident x-ray diffractometry and Raman spectroscopy. The electrical and optical properties were determined using a four point probe technique and UV-VIS-IR spectrometry, respectively.

原文English
頁(從 - 到)29-34
頁數6
期刊Journal of Nano Research
6
DOIs
出版狀態Published - 2009 6月 30

All Science Journal Classification (ASJC) codes

  • 材料科學(全部)
  • 物理與天文學 (全部)

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