Nanotribology of amorphous hydrogenated carbon films using scanning probe microscopy

Te Hua Fang, Cheng I. Weng, Jee Gong Chang, Chi Chuan Hwang

研究成果: Article同行評審

6 引文 斯高帕斯(Scopus)

摘要

Nanotribological characterization of amorphous hydrogenated carbon (a-C:H) films is performed by scanning probe microscopy. The a-C:H films are produced on silicon substrate by electron cyclotron resonance microwave plasma chemical vapor deposition (ECR-MPCVD). The influences of different percentages of hydrogen (H2) and methane (CH4) in the gas-discharge plasmas on the nanotribological characteristics are investigated. Scanning probe nanotribological tests, including the nano-friction, nano-wear and nano-scratch, are carried out. Large quantitative variations of the friction coefficient as well as the wear depth are found for different H2 content percentages in source gas. The results indicate that a higher H2 content in the source gas is beneficial to wear and scratch resistance, and produces a lower friction coefficient and that source gas H2 content plays an important role in the tribological characteristics of diamond-like films.

原文English
頁(從 - 到)167-173
頁數7
期刊Thin Solid Films
396
發行號1-2
DOIs
出版狀態Published - 2001 9月 21

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 表面和介面
  • 表面、塗料和薄膜
  • 金屬和合金
  • 材料化學

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