Nitride-based LEDs with phosphoric acid etched undercut sidewalls

D. S. Kuo, Shoou Jinn Chang, T. K. Ko, C. F. Shen, S. J. Hon, S. C. Hung

研究成果: Article同行評審

25 引文 斯高帕斯(Scopus)

摘要

We propose a simple defect-selective wet etching method to form oblique sidewalls for GaN-based epitaxial layers with phosphoric acid. Using the same defect-selective wet etching, we also prepared GaN-based light-emitting diodes (LEDs) with undercut sidewalls. Compared with conventional LEDs with vertical sidewalls, it was found that output intensity of the LEDs prepared by defect-selective wet etching was 30% higher.

原文English
頁(從 - 到)510-512
頁數3
期刊IEEE Photonics Technology Letters
21
發行號8
DOIs
出版狀態Published - 2009 4月 15

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 原子與分子物理與光學
  • 電氣與電子工程

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