Nitrogen Oxide (NO2) Gas Sensing Performance of ZnO Nanoparticles (NPs)/Sapphire-Based Sensors

Po Cheng Chou, Huey Ing Chen, I. Ping Liu, Chun Chia Chen, Jian Kai Liou, Cheng Jing Lai, Wen Chau Liu

研究成果: Article同行評審

9 引文 斯高帕斯(Scopus)

摘要

The interesting ZnO nanoparticles (NPs)-based sensor devices are fabricated on sapphire substrates to study the nitrogen oxide (NO2) gas sensing performance. The postheat treatment process is not used to avoid the undesired agglomeration phenomenon. Different concentrations (0.1 and 0.01 wt%) of ZnO NPs are employed to produce the studied NO2 gas sensors. Experimentally, studied devices demonstrate good NO2 sensing responses ∼100 (at 5 ppm NO2/air, 473 K). Especially, an extremely low sensing limit of 10 ppb NO2/air is obtained for the studied devices. This value is superior to those of previously reported results from other NO2 sensors. The studied sensor devices also show the advantages of low cost, easy fabrication, and compact potentiality to integrate with other high-speed and optoelectronic devices. Therefore, the studied devices give the promise for high-performance NO2 monitoring applications.

原文English
文章編號7050338
頁(從 - 到)3759-3763
頁數5
期刊IEEE Sensors Journal
15
發行號7
DOIs
出版狀態Published - 2015 七月 1

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Electrical and Electronic Engineering

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