Note: Development of a high resolution six-degrees-of-freedom optical vibrometer for precision stage

Tung Hsien Hsieh, Wen Yuh Jywe, Shang-Liang Chen, Chien Hung Liu, Hsueh Liang Huang

研究成果: Article

3 引文 (Scopus)

摘要

A high resolution six degrees of freedom (6-DOF) optical vibrometer is proposed. 6-DOF vibrations can be simultaneously measured using the proposed optical vibrometer, which reduces measurement time and number. The performance of the proposed vibrometer is verified by experiments. The results show that the accuracy of the proposed optical vibrometer is 30 nm200 nm and 0.04 arcsec0.1 arcsec at 1000 Hz.

原文English
文章編號056101
期刊Review of Scientific Instruments
82
發行號5
DOIs
出版狀態Published - 2011 五月 1

指紋

vibration meters
Time measurement
degrees of freedom
high resolution
Experiments
time measurement
vibration

All Science Journal Classification (ASJC) codes

  • Instrumentation

引用此文

Hsieh, Tung Hsien ; Jywe, Wen Yuh ; Chen, Shang-Liang ; Liu, Chien Hung ; Huang, Hsueh Liang. / Note : Development of a high resolution six-degrees-of-freedom optical vibrometer for precision stage. 於: Review of Scientific Instruments. 2011 ; 卷 82, 編號 5.
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Note : Development of a high resolution six-degrees-of-freedom optical vibrometer for precision stage. / Hsieh, Tung Hsien; Jywe, Wen Yuh; Chen, Shang-Liang; Liu, Chien Hung; Huang, Hsueh Liang.

於: Review of Scientific Instruments, 卷 82, 編號 5, 056101, 01.05.2011.

研究成果: Article

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