Note: Development of a high resolution six-degrees-of-freedom optical vibrometer for precision stage

Tung Hsien Hsieh; Wen Yuh Jywe; Shang Liang Chen; Chien Hung Liu; Hsueh Liang Huang

doi:10.1063/1.3585021

Note: Development of a high resolution six-degrees-of-freedom optical vibrometer for precision stage

Tung Hsien Hsieh, Wen Yuh Jywe, Shang Liang Chen, Chien Hung Liu, Hsueh Liang Huang

製造資訊與系統研究所

研究成果: Article › 同行評審

5 引文斯高帕斯（Scopus）

摘要

A high resolution six degrees of freedom (6-DOF) optical vibrometer is proposed. 6-DOF vibrations can be simultaneously measured using the proposed optical vibrometer, which reduces measurement time and number. The performance of the proposed vibrometer is verified by experiments. The results show that the accuracy of the proposed optical vibrometer is 30 nm200 nm and 0.04 arcsec0.1 arcsec at 1000 Hz.

原文	English
文章編號	056101
期刊	Review of Scientific Instruments
卷	82
發行號	5
DOIs	https://doi.org/10.1063/1.3585021
出版狀態	Published - 2011 5月

All Science Journal Classification (ASJC) codes

儀器

存取文件

10.1063/1.3585021

其它文件與鏈接

引用此

@article{108399670be840fd81abf1765e5cf899,

title = "Note: Development of a high resolution six-degrees-of-freedom optical vibrometer for precision stage",

abstract = "A high resolution six degrees of freedom (6-DOF) optical vibrometer is proposed. 6-DOF vibrations can be simultaneously measured using the proposed optical vibrometer, which reduces measurement time and number. The performance of the proposed vibrometer is verified by experiments. The results show that the accuracy of the proposed optical vibrometer is 30 nm200 nm and 0.04 arcsec0.1 arcsec at 1000 Hz.",

author = "Hsieh, {Tung Hsien} and Jywe, {Wen Yuh} and Chen, {Shang Liang} and Liu, {Chien Hung} and Huang, {Hsueh Liang}",

year = "2011",

month = may,

doi = "10.1063/1.3585021",

language = "English",

volume = "82",

journal = "Review of Scientific Instruments",

issn = "0034-6748",

publisher = "American Institute of Physics Publising LLC",

number = "5",

}

TY - JOUR

T1 - Note

T2 - Development of a high resolution six-degrees-of-freedom optical vibrometer for precision stage

AU - Hsieh, Tung Hsien

AU - Jywe, Wen Yuh

AU - Chen, Shang Liang

AU - Liu, Chien Hung

AU - Huang, Hsueh Liang

PY - 2011/5

Y1 - 2011/5

N2 - A high resolution six degrees of freedom (6-DOF) optical vibrometer is proposed. 6-DOF vibrations can be simultaneously measured using the proposed optical vibrometer, which reduces measurement time and number. The performance of the proposed vibrometer is verified by experiments. The results show that the accuracy of the proposed optical vibrometer is 30 nm200 nm and 0.04 arcsec0.1 arcsec at 1000 Hz.

AB - A high resolution six degrees of freedom (6-DOF) optical vibrometer is proposed. 6-DOF vibrations can be simultaneously measured using the proposed optical vibrometer, which reduces measurement time and number. The performance of the proposed vibrometer is verified by experiments. The results show that the accuracy of the proposed optical vibrometer is 30 nm200 nm and 0.04 arcsec0.1 arcsec at 1000 Hz.

UR - http://www.scopus.com/inward/record.url?scp=79958050050&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79958050050&partnerID=8YFLogxK

U2 - 10.1063/1.3585021

DO - 10.1063/1.3585021

M3 - Article

C2 - 21639549

AN - SCOPUS:79958050050

SN - 0034-6748

VL - 82

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

IS - 5

M1 - 056101

ER -

Note: Development of a high resolution six-degrees-of-freedom optical vibrometer for precision stage

摘要

All Science Journal Classification (ASJC) codes

存取文件

其它文件與鏈接

指紋

引用此