Note: Development of a high resolution six-degrees-of-freedom optical vibrometer for precision stage

Tung Hsien Hsieh, Wen Yuh Jywe, Shang Liang Chen, Chien Hung Liu, Hsueh Liang Huang

研究成果: Article同行評審

5 引文 斯高帕斯(Scopus)

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Physics & Astronomy

Engineering & Materials Science