Novel automatic offset cancellation approach for capacitive CMOS MEMS accelerometers

Po Chang Wu, Bin-Da Liu, Yu Chen Teng, Chih Yuan Yeh, Sheng Hsiang Tseng, Hann Huei Tsai, Ying Zong Juang

研究成果: Conference contribution

1 引文 斯高帕斯(Scopus)

摘要

A monolithic inertial sensor based automatic offset calibration technique is proposed in this paper. With this technique, the output offset voltage caused by sensor and amplifier mismatches is trimmed from 600mV down to 50mV from the measurement results. For providing larger dynamic range, a programmable gain control amplifier is included in this architecture. This inertial sensor is implemented by the 0.18μm CMOS MEMS process and the total chip area is 1.3 × 1.3 mm2.

原文English
主出版物標題2013 IEEE 17th International Symposium on Consumer Electronics, ISCE 2013
頁面147-148
頁數2
DOIs
出版狀態Published - 2013 9月 11
事件2013 IEEE 17th International Symposium on Consumer Electronics, ISCE 2013 - Hsinchu, Taiwan
持續時間: 2013 6月 32013 6月 6

出版系列

名字Proceedings of the International Symposium on Consumer Electronics, ISCE

Other

Other2013 IEEE 17th International Symposium on Consumer Electronics, ISCE 2013
國家/地區Taiwan
城市Hsinchu
期間13-06-0313-06-06

All Science Journal Classification (ASJC) codes

  • 工程 (全部)

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