Novel fast laser-based auto-focusing microscope

Chien Sheng Liu, Pin Hao Hu, Yung Hsing Wang, Shun Sheng Ke, Yang Cheng Lin, Yu Hsiu Chang, Ji Bin Horng

研究成果: Conference contribution

7 引文 斯高帕斯(Scopus)

摘要

In keeping with consumer preferences for ever more high-performance products, a requirement exists for precise and fast auto-focusing microscope systems for the inspection processes in mass production lines. Accordingly, the present study proposes a precise and fast laser-based auto-focusing microscope system in which an auto-focusing capability is achieved by using a position feedback signal from the centroid of the image of the reflected laser beam captured from a CCD sensor. The experimental results show that the proposed auto-focusing microscope system is under a 1 s cycle time and ±3 μm positioning accuracy with a ±500 μm linear working range. Overall, it is shown that the proposed auto-focusing microscope system has both a fast response and high positioning accuracy.

原文English
主出版物標題IEEE Sensors 2010 Conference, SENSORS 2010
頁面481-485
頁數5
DOIs
出版狀態Published - 2010 十二月 1
事件9th IEEE Sensors Conference 2010, SENSORS 2010 - Waikoloa, HI, United States
持續時間: 2010 十一月 12010 十一月 4

出版系列

名字Proceedings of IEEE Sensors

Other

Other9th IEEE Sensors Conference 2010, SENSORS 2010
國家United States
城市Waikoloa, HI
期間10-11-0110-11-04

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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