Novel Reliability Mechanism of Quasi Reaction-Diffusion Model for PBTI in n-channel HfO2 LTPS-TFTs with Dual Plasma Treatment

Chien Hung Wu, Bo Wen Huang, Kow Ming Chang, Ting Chia Chang, Lin Sheng-Chia , Jian Hong Lin, Shui-Jinn Wang

研究成果: Conference contribution

原文English
主出版物標題The 11th International Thin Film Transistor Conference
出版地Rennes, France
出版狀態Published - 2015 二月 27

引用此

Wu, C. H., Huang, B. W., Chang, K. M., Chang, T. C., Sheng-Chia , L., Lin, J. H., & Wang, S-J. (2015). Novel Reliability Mechanism of Quasi Reaction-Diffusion Model for PBTI in n-channel HfO2 LTPS-TFTs with Dual Plasma Treatment. 於 The 11th International Thin Film Transistor Conference