Novel Reliability Mechanism of Quasi Reaction-Diffusion Model for PBTI in n-channel HfO2 LTPS-TFTs with Dual Plasma Treatment

Chien Hung Wu; Bo Wen Huang; Kow Ming Chang; Ting Chia Chang; Lin Sheng-Chia; Jian Hong Lin; Shui-Jinn Wang

Novel Reliability Mechanism of Quasi Reaction-Diffusion Model for PBTI in n-channel HfO2 LTPS-TFTs with Dual Plasma Treatment

Chien Hung Wu, Bo Wen Huang, Kow Ming Chang, Ting Chia Chang, Lin Sheng-Chia , Jian Hong Lin, Shui-Jinn Wang

微電子工程研究所

研究成果: Conference contribution

原文	English
主出版物標題	The 11th International Thin Film Transistor Conference
出版地	Rennes, France
出版狀態	Published - 2015 2月 27

引用此

@inproceedings{9fd7a4ceb6094eb480427c3e28322489,

title = "Novel Reliability Mechanism of Quasi Reaction-Diffusion Model for PBTI in n-channel HfO2 LTPS-TFTs with Dual Plasma Treatment",

author = "Wu, {Chien Hung} and Huang, {Bo Wen} and Chang, {Kow Ming} and Chang, {Ting Chia} and Lin Sheng-Chia and Lin, {Jian Hong} and Shui-Jinn Wang",

year = "2015",

month = feb,

day = "27",

language = "English",

booktitle = "The 11th International Thin Film Transistor Conference",

}

TY - GEN

T1 - Novel Reliability Mechanism of Quasi Reaction-Diffusion Model for PBTI in n-channel HfO2 LTPS-TFTs with Dual Plasma Treatment

AU - Wu, Chien Hung

AU - Huang, Bo Wen

AU - Chang, Kow Ming

AU - Chang, Ting Chia

AU - Sheng-Chia , Lin

AU - Lin, Jian Hong

AU - Wang, Shui-Jinn

PY - 2015/2/27

Y1 - 2015/2/27

M3 - Conference contribution

BT - The 11th International Thin Film Transistor Conference

CY - Rennes, France

ER -