Novel spatially coordinated in-situ Raman and nanoscale wear analysis of FCVA-deposited DLC film

Mehdi Rouhani, Jonathan Hobley, Franklin Chau Nan Hong, Yeau Ren Jeng

研究成果: Article

摘要

A novel combined in-situ system, integrating Raman spectroscopy and depth-sensing techniques, was applied to analyze the wear induced transformation on the microstructure of diamond-like carbon (DLC) film deposited on Si substrates using a filtered cathodic arc vacuum (FCVA) deposition system. Using this synchronized characterization technique it was demonstrated that upon wear-induced removal of upper surface layers, the intensity ratio (ID/IG) for the area inside wear tracks decreases. On the other hand, while the peak position for the D line (PD) shifts to higher wavenumbers, the peak position for the G line (PG) shifts to lower wavenumbers. The coefficient of friction shows significant reduction upon increasing the depth of the wear tracks. These results confirm our previous preliminary report on the possible existence of layers rich in sp2 in the surface region. It was also shown that the wear debris is more graphitized.

原文English
文章編號065215
期刊AIP Advances
9
發行號6
DOIs
出版狀態Published - 2019 六月 1

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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