Ohmic contacts to GaN with rapid thermal annealing

L. W. Chi, K. T. Lam, Y. K. Kao, F. S. Juang, Y. S. Tsai, Y. K. Su, S. J. Chang, C. C. Chen, J. K. Sheu

研究成果: Conference article

1 引文 斯高帕斯(Scopus)

摘要

This research attempted to use metals with lower work functions, such as Ti, Al, to form ohmic contacts to n-GaN. Then we used metals with higher work functions, such as Ni, Pd, Pt, and Au to form ohmic contacts to p-GaN. The work functions of these metals indeed influence the performance of ohmic contacts, indicating that the Fermi level of GaN is unpinned. The specific contact resistance measured and calculated by TCL model, was 2.35×10-3 Ωcm2 for as-deposited Ti/Al on GaN. After RTA processes at different temperatures in the range of 400 to approximately 900 °C, the minimum ρc of 7.4×10-5 Ωcm2 can be obtained for RTA temperature of 600 °C. The oxidized Ni/Au contact exhibited the lowest contact resistance of 1.02×10-2 Ωcm2, among Ni/Au, Pd/Au, Pt/Au contact schemes on p-GaN. It was also observed that the I-V curves of the triple-layer contact, Pt/Ni/Au, was near-linear while the others were rectifying even after annealing.

原文English
頁(從 - 到)224-233
頁數10
期刊Proceedings of SPIE - The International Society for Optical Engineering
3938
出版狀態Published - 2000 一月 1
事件Light-Emitting Diodes: Research, Manufacturing, and Applications IV - San Jose, CA, USA
持續時間: 2000 一月 262000 一月 27

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • 引用此

    Chi, L. W., Lam, K. T., Kao, Y. K., Juang, F. S., Tsai, Y. S., Su, Y. K., Chang, S. J., Chen, C. C., & Sheu, J. K. (2000). Ohmic contacts to GaN with rapid thermal annealing. Proceedings of SPIE - The International Society for Optical Engineering, 3938, 224-233.