On the Planarization Mechanism and Pad Aging Effects of Soft Pad Polishing: A Perspective from the Micro-Mechanical Properties of Soft Pads

Yeau-Ren Jeng, Ping Chi Tsai, Yu Zheng Lin

研究成果: Article

摘要

The local viscoelastic properties of soft polishing pads with different usage durations are measured by a micro-scale mechanical analysis testing platform. The testing reveals stimulus-adaptive local viscoelasticity of soft pads under the activation of asperity contact. This phenomenon suggests asperity-dependent local modulus. Such an increase of local modulus induced by higher asperity provides a further enhancement effect to the planarization of surface asperity. Furthermore, the measurement outcomes suggest that the reaction of local micro-scale viscoelastic properties of the soft pad surface to the workpiece asperity will decay with usage time. The current study provides a detailed understanding of the aging effects for the soft pad and explains the performance decay during soft pad polishing from a local micro-scale interfacial perspective.

原文English
文章編號064501
期刊Journal of Tribology
141
發行號6
DOIs
出版狀態Published - 2019 六月 1

All Science Journal Classification (ASJC) codes

  • Mechanics of Materials
  • Mechanical Engineering
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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