On the temperature compensation of parallel piezoresistive microcantilevers in biosensors

Shih-Ming Yang, C. Chang, T. I. Yin

研究成果: Conference contribution

摘要

Microcantilever with embedded piezoresistor has been applied to in-situ surface stress measurement of biochemical reaction, where parallel microcantilever design by using an active cantilever for biosensing and another reference cantilever for noise cancellation has previously been proposed. This paper shows that the measurement is sensitive to the temperature effect induced by the piezoresistor. The temperature difference between the two cantilevers can reach 40°C at 10V operation because of their difference thermal capacitance. For the microcantilever of 125×65×0.75 μm, the offset voltage of the parallel microcantilever is 1.65 mV and the temperature drift is 0.01 mV/°C. An improved parallel microcantilever design is developed using the stripe pattern design on the immobilized layer and the signal conditioning circuit for temperature compensation in biosensors. Analyses and experiments show that the performance of a CMOS sensor chip can be significantly improved.

原文English
主出版物標題2007 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2007
頁面693-717
頁數25
DOIs
出版狀態Published - 2008 六月 13
事件19th Int. Conf. Design Theory and Methodology and 1st Int. Conf. Micro and Nano Systems, presented at - 2007 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2007 - Las Vegas, NV, United States
持續時間: 2007 九月 42007 九月 7

出版系列

名字2007 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2007
3 PART A

Other

Other19th Int. Conf. Design Theory and Methodology and 1st Int. Conf. Micro and Nano Systems, presented at - 2007 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2007
國家United States
城市Las Vegas, NV
期間07-09-0407-09-07

All Science Journal Classification (ASJC) codes

  • Computer Graphics and Computer-Aided Design
  • Computer Science Applications
  • Mechanical Engineering
  • Modelling and Simulation

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