On the temperature compensation of parallel piezoresistive microcantilevers in CMOS biosensor

S. M. Yang, C. Chang, T. I. Yin

研究成果: Article同行評審

16 引文 斯高帕斯(Scopus)

摘要

Microcantilever with embedded piezoresistor has been applied to in situ surface stress measurement of biochemical reaction, where the parallel microcantilever by using an active cantilever for biosensing and another reference cantilever for noise cancellation has previously been proposed. This paper shows that the microcantilever measurement is sensitive to the temperature effect induced by the piezoresistor. The two cantilevers of 125 μm × 60 μm × 0.75 μm may have 40 °C temperature difference, 1.65 mV offset voltage, and 0.01 mV/°C temperature drift in 10 V operation because of their different thermal inertia. A parallel microcantilever design is developed for temperature compensation by using a signal conditioning circuit and the stripe pattern immobilized layer. Analyses and experiments show that the performance of parallel microcantilever sensor can be significantly improved.

原文English
頁(從 - 到)678-684
頁數7
期刊Sensors and Actuators, B: Chemical
129
發行號2
DOIs
出版狀態Published - 2008 二月 22

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 儀器
  • 凝聚態物理學
  • 表面、塗料和薄膜
  • 金屬和合金
  • 電氣與電子工程
  • 材料化學

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