In MEMS, the geometry and applied loads between strength testing coupon and structures for design are usually different and the strength data cannot be directly applied without modification for designing brittle MEMS structures. In this paper, a method based on equal failure probability is proposed to find the equivalent strength for design by scaling the test strength with a parameter called stress ratio. By the same approach, it is also possible to correlate MEMS material strength data obtained by different testing schemes.
|頁（從 - 到）||101-106|
|期刊||Materials Research Society Symposium - Proceedings|
|出版狀態||Published - 2002|
|事件||Materials Science of Microelectromechanical Systems (MEMS) Devices IV - Boston, MA, United States|
持續時間: 2001 11月 25 → 2001 11月 28
All Science Journal Classification (ASJC) codes