On the unification of material strength testing for MEMS applications

研究成果: Conference article同行評審

1 引文 斯高帕斯(Scopus)

摘要

In MEMS, the geometry and applied loads between strength testing coupon and structures for design are usually different and the strength data cannot be directly applied without modification for designing brittle MEMS structures. In this paper, a method based on equal failure probability is proposed to find the equivalent strength for design by scaling the test strength with a parameter called stress ratio. By the same approach, it is also possible to correlate MEMS material strength data obtained by different testing schemes.

原文English
頁(從 - 到)101-106
頁數6
期刊Materials Research Society Symposium - Proceedings
687
出版狀態Published - 2002
事件Materials Science of Microelectromechanical Systems (MEMS) Devices IV - Boston, MA, United States
持續時間: 2001 十一月 252001 十一月 28

All Science Journal Classification (ASJC) codes

  • 材料科學(全部)
  • 凝聚態物理學
  • 材料力學
  • 機械工業

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