TY - GEN
T1 - Optical and electrical properties of ZnO/Pt/ZnO multilayer coatings using Sol-Gel technology
AU - Hsieh, Po-Tsung
AU - Kao, Kuo Sheng
AU - Chen, Ying Chung
AU - Lee, Maw Shung
AU - Tsai, Yuh Tarng
PY - 2009/12/1
Y1 - 2009/12/1
N2 - A multilayer ZnO/Pt/ZnO thin film was studied. A ZnO thin film was prepared by sol-gel technology and the Pt layer was deposited by DC sputtering. The thickness of the Pt layer was the critical point to influence the performance for the multilayer thin films. Therefore, multilayer ZnO/Pt/ZnO coatings with various thicknesses of Pt layer were fabricated to investigate the optical and electrical characteristics. The results illustrated that a Pt layer with a thickness of 3nm exhibited the highest transmittance. After deposition of the multilayer thin films, the transmittance increased by nearly 70%. However, the transmittance was decreased as the thickness of Pt was increased. The conductivity was increased over one order with the increasing Pt thickness. Keywords: multilayer, transmittance, ZnO, Pt.
AB - A multilayer ZnO/Pt/ZnO thin film was studied. A ZnO thin film was prepared by sol-gel technology and the Pt layer was deposited by DC sputtering. The thickness of the Pt layer was the critical point to influence the performance for the multilayer thin films. Therefore, multilayer ZnO/Pt/ZnO coatings with various thicknesses of Pt layer were fabricated to investigate the optical and electrical characteristics. The results illustrated that a Pt layer with a thickness of 3nm exhibited the highest transmittance. After deposition of the multilayer thin films, the transmittance increased by nearly 70%. However, the transmittance was decreased as the thickness of Pt was increased. The conductivity was increased over one order with the increasing Pt thickness. Keywords: multilayer, transmittance, ZnO, Pt.
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M3 - Conference contribution
AN - SCOPUS:84878940040
SN - 9781617823848
T3 - 11th International Conference and Exhibition of the European Ceramic Society 2009
SP - 338
EP - 340
BT - 11th International Conference and Exhibition of the European Ceramic Society 2009
T2 - 11th International Conference and Exhibition of the European Ceramic Society 2009
Y2 - 21 June 2009 through 25 June 2009
ER -