Optimal design and operation for a no-moving-parts-valve (NMPV) micro-pump with a diffuser width of 500 μm

Chin Tsan Wang, Tzong Shyng Leu, Jia Ming Sun

研究成果: Article同行評審

6 引文 斯高帕斯(Scopus)

摘要

A no-moving-parts-valve (NMPV) with a diffuser width of D = 500 microns was investigated in this study by numerical simulations at Reynolds numbers, ReD, ranging from 20 to 75, and expansion valve angles ranging from 30° < θ1 < 57° and 110° < θ2 < 120°. The Dp,i value, 1.02 < Dp,i < 1.14, is larger within the proposed range of the expansion valve angles. A flow channel structure with a depth of 500 micron is manufactured using yellow light lithography in this study. From prior analyses and experiments, it is found that piezoelectric films work better at a buzz driving frequency of f < 30Hz and the best operating frequency is at a driving frequency of f = 10Hz because it produces the largest net flow. In addition, the expansion angles θ1 = 30° and θ2 = 120° are the best expansion angles because they produce the largest net flow. These related results are very helpful for the actual design of no-moving-parts-valve micro-pump.

原文English
頁(從 - 到)3666-3678
頁數13
期刊Sensors
9
發行號5
DOIs
出版狀態Published - 2009 四月 27

All Science Journal Classification (ASJC) codes

  • Analytical Chemistry
  • Biochemistry
  • Atomic and Molecular Physics, and Optics
  • Instrumentation
  • Electrical and Electronic Engineering

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