Optimal design of piezoelectric actuator for precision positioning applications

Lien Kai Chang, Mi Ching Tsai

研究成果: Conference contribution

1 引文 斯高帕斯(Scopus)

摘要

Recent advances in measurement systems require positioning systems with high stiffness, accuracy and speed. Piezoelectric actuators which are featured with mechanical simplicity, quick response, and electromagnetic immunity, are often used in precision positioning. It is known that piezoelectric actuators can achieve high positioning accuracy by the stepping mode but low speed. By contrast, the resonance vibration mode will offer high positioning speed, but sacrifices the high inherent position resolution. For the stepping mode, the displacement of the piezoelectric actuator significantly affects the speed, of which larger displacement induces higher speed. For the resonance vibration mode, an elliptical motion of the piezoelectric actuator tip is generated by horizontal and vertical eigenmodes, and the optimal efficiency can be achieved when the two eigenmodes are operated at the same frequency. For the applications of high positioning accuracy and speed, a piezoelectric actuator should be designed by taking these two operation modes into consideration simultaneously. Based on these requirements, the optimal structural dimensions of a piezoelectric actuator are obtained using a genetic algorithm.

原文English
主出版物標題Precision Engineering and Nanotechnology V
發行者Trans Tech Publications Ltd
頁面224-229
頁數6
ISBN(列印)9783038352112
DOIs
出版狀態Published - 2015
事件5th International Conference on Asian Society for Precision Engineering and Nanotechnology, ASPEN 2013 - Taipei, Taiwan
持續時間: 2013 11月 122013 11月 15

出版系列

名字Key Engineering Materials
625
ISSN(列印)1013-9826
ISSN(電子)1662-9795

Other

Other5th International Conference on Asian Society for Precision Engineering and Nanotechnology, ASPEN 2013
國家/地區Taiwan
城市Taipei
期間13-11-1213-11-15

All Science Journal Classification (ASJC) codes

  • 材料科學(全部)
  • 材料力學
  • 機械工業

指紋

深入研究「Optimal design of piezoelectric actuator for precision positioning applications」主題。共同形成了獨特的指紋。

引用此