Opto-electromagnetic properties of carbon-doped zinc-oxide prepared using electrically induced crystallization and ion implantation process for gas sensor application

Tai Hsiang Liu, Fei Yi Hung, Tao Chien, Kuan Jen Chen

研究成果: Article同行評審

2 引文 斯高帕斯(Scopus)

摘要

A double-layer carbon-doped zinc oxide (ZnO/C) film structure was prepared using electrically induced crystallization (EIC) diffusion. The bottom layer atoms (C) were doped into the ZnO crystal structure, inducing intrinsic ferromagnetic characteristics and enhancing optical and electrical properties. The ion implantation process for ZnO/C is discussed in terms of optical, electrical, and magnetic performance. The sensitivity and switching speed of ZnO/C for sensing a volatile gas (alcohol) are evaluated. The EIC process leads to better sensitivity compared to those obtained with annealing and the ion implantation process.

原文English
頁(從 - 到)144-153
頁數10
期刊Journal of Materials Science: Materials in Electronics
31
發行號1
DOIs
出版狀態Published - 2020 一月 1

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 原子與分子物理與光學
  • 凝聚態物理學
  • 電氣與電子工程

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