Opto-mechatronic configurations to maximize dynamic range and optimize resolution of optical instruments

Chih Kung Lee, Tsung Dar Cheng, Shu Sheng Lee, Chin Kai Chang

研究成果: Article同行評審

2 引文 斯高帕斯(Scopus)

摘要

We developed a new mechanical configuration which combines various optical techniques to maximize dynamic range and to optimize resolution in optical instruments. We assessed various optical configurations by looking at such variables as electronic signal processing and mechanical construction. Previous configurations developed over the last 10 years are discussed. In our new configuration, we adopted and integrated devices such as a microscopic, an interferometer, an electronic speckle pattern interferometer, and a photon tunneling microscope. We examined the impact of our new configuration on future opto-mechatronic systems design. Our new configuration can be an effective and versatile optical metrology tool for enhancing the performance of MEMS and NEMS devices.

原文English
頁(從 - 到)133-140
頁數8
期刊Optical Review
16
發行號2
DOIs
出版狀態Published - 2009 3月 1

All Science Journal Classification (ASJC) codes

  • 原子與分子物理與光學

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