Origin of stress memorization mechanism in strained-Si nMOSFETs using a low-cost stress-memorization technique

Yao Tsung Huang, San Lein Wu, Shoou Jinn Chang, Cheng Wen Kuo, Ya Ting Chen, Yao Chin Cheng, Osbert Cheng

研究成果: Article同行評審

6 引文 斯高帕斯(Scopus)

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Engineering & Materials Science