Oxidation behaviors of PVD TiAlN films

Ding Fwu Lii, Jow Lay Huang, Bor Yuan Shew

研究成果: Conference article同行評審

摘要

The oxidation behaviors of polycrystalline TiAlN films are studied. Specifically, the weight change and heat transfer of TiAlN films at different temperature are verified using thermogravimetric analysis and differential thermal gravimetric analysis. The composition and distribution of the oxidizing layers over TiAlN films are analyzed by in-situ high temperature x-ray (HXRD) diffractometer, Augur electron spectroscopy and glancing XRD. The effects of Al content on the high temperature oxidation resistance and the distribution of oxidized phases on the TiAlN films are extensively investigated.

原文English
頁(從 - 到)1505-1506
頁數2
期刊Key Engineering Materials
132-136
發行號Pt 3
出版狀態Published - 1997 一月 1
事件Proceedings of the 1997 5th Conference and Exhibition of the European Ceramic Society. Part 3 (of 3) - Versailles, Fr
持續時間: 1997 六月 221997 六月 26

All Science Journal Classification (ASJC) codes

  • 材料科學(全部)
  • 材料力學
  • 機械工業

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