The oxidation behaviors of polycrystalline TiAlN films are studied. Specifically, the weight change and heat transfer of TiAlN films at different temperature are verified using thermogravimetric analysis and differential thermal gravimetric analysis. The composition and distribution of the oxidizing layers over TiAlN films are analyzed by in-situ high temperature x-ray (HXRD) diffractometer, Augur electron spectroscopy and glancing XRD. The effects of Al content on the high temperature oxidation resistance and the distribution of oxidized phases on the TiAlN films are extensively investigated.
|頁（從 - 到）||1505-1506|
|期刊||Key Engineering Materials|
|出版狀態||Published - 1997 一月 1|
|事件||Proceedings of the 1997 5th Conference and Exhibition of the European Ceramic Society. Part 3 (of 3) - Versailles, Fr|
持續時間: 1997 六月 22 → 1997 六月 26
All Science Journal Classification (ASJC) codes