Parametric investigation of Laser-Assisted Direct Imprint (LADI) technique

C. Y. Lin, Y. C. Lee, F. B. Hsiao, C. H. Chuang

研究成果: Conference contribution

1 引文 (Scopus)

摘要

Nano-imprinting Lithography (NIL) has been considered as the most promising technique for nano-scaled fabrication and patterning. Recently, a new approach known as Laser-Assisted Direct Imprinting(LADI) has been proposed and demonstrated as an even more efficient way for direct nanofabrication and nanopatterning. In this study, we focused on silicon materials and utilized a single KrF excimer laser pulse (248 nm wavelength and 30 ns pulse duration) as the heating source. Molds of micro-scaled size have been prepared using conventional photolithography techniques. A working platform based on an Excimer Laser Micro-Machining system is constructed for LADI process. The influence of laser fluence and the imprinted pressure on the resulting structures was verifying by varying the laser fluence (1.0 - 1.2 J/cm2) and the imprinted load (3 - 9kg). The results have shown that the morphology and the imprinted depth were directly related to the laser fluence and the imprinted pressure. Quantitative data are obtained and will be addressed.

原文English
主出版物標題Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture
頁面307-312
頁數6
版本PART 1
出版狀態Published - 2006 十二月 1
事件2005 International Conference on Advanced Manufacture, ICAM2005 - Taipei, R.O.C., Taiwan
持續時間: 2005 十一月 282005 十二月 2

出版系列

名字Materials Science Forum
號碼PART 1
505-507
ISSN(列印)0255-5476

Other

Other2005 International Conference on Advanced Manufacture, ICAM2005
國家Taiwan
城市Taipei, R.O.C.
期間05-11-2805-12-02

指紋

Lasers
fluence
nanofabrication
lasers
Excimer lasers
Nanotechnology
excimer lasers
Laser pulses
Molds
Photolithography
Silicon
photolithography
machining
Lithography
Machining
pulse duration
lithography
platforms
Heating
Wavelength

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

引用此文

Lin, C. Y., Lee, Y. C., Hsiao, F. B., & Chuang, C. H. (2006). Parametric investigation of Laser-Assisted Direct Imprint (LADI) technique. 於 Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture (PART 1 編輯, 頁 307-312). (Materials Science Forum; 卷 505-507, 編號 PART 1).
Lin, C. Y. ; Lee, Y. C. ; Hsiao, F. B. ; Chuang, C. H. / Parametric investigation of Laser-Assisted Direct Imprint (LADI) technique. Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture. PART 1. 編輯 2006. 頁 307-312 (Materials Science Forum; PART 1).
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Lin, CY, Lee, YC, Hsiao, FB & Chuang, CH 2006, Parametric investigation of Laser-Assisted Direct Imprint (LADI) technique. 於 Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture. PART 1 edn, Materials Science Forum, 編號 PART 1, 卷 505-507, 頁 307-312, 2005 International Conference on Advanced Manufacture, ICAM2005, Taipei, R.O.C., Taiwan, 05-11-28.

Parametric investigation of Laser-Assisted Direct Imprint (LADI) technique. / Lin, C. Y.; Lee, Y. C.; Hsiao, F. B.; Chuang, C. H.

Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture. PART 1. 編輯 2006. p. 307-312 (Materials Science Forum; 卷 505-507, 編號 PART 1).

研究成果: Conference contribution

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Lin CY, Lee YC, Hsiao FB, Chuang CH. Parametric investigation of Laser-Assisted Direct Imprint (LADI) technique. 於 Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture. PART 1 編輯 2006. p. 307-312. (Materials Science Forum; PART 1).