Parametric investigation of Laser-Assisted Direct Imprint (LADI) technique

C. Y. Lin, Y. C. Lee, F. B. Hsiao, C. H. Chuang

研究成果: Conference contribution

2 引文 斯高帕斯(Scopus)

摘要

Nano-imprinting Lithography (NIL) has been considered as the most promising technique for nano-scaled fabrication and patterning. Recently, a new approach known as Laser-Assisted Direct Imprinting(LADI) has been proposed and demonstrated as an even more efficient way for direct nanofabrication and nanopatterning. In this study, we focused on silicon materials and utilized a single KrF excimer laser pulse (248 nm wavelength and 30 ns pulse duration) as the heating source. Molds of micro-scaled size have been prepared using conventional photolithography techniques. A working platform based on an Excimer Laser Micro-Machining system is constructed for LADI process. The influence of laser fluence and the imprinted pressure on the resulting structures was verifying by varying the laser fluence (1.0 - 1.2 J/cm2) and the imprinted load (3 - 9kg). The results have shown that the morphology and the imprinted depth were directly related to the laser fluence and the imprinted pressure. Quantitative data are obtained and will be addressed.

原文English
主出版物標題Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture
發行者Trans Tech Publications Ltd
頁面307-312
頁數6
版本PART 1
ISBN(列印)0878499903, 9780878499908
DOIs
出版狀態Published - 2006
事件2005 International Conference on Advanced Manufacture, ICAM2005 - Taipei, R.O.C., Taiwan
持續時間: 2005 11月 282005 12月 2

出版系列

名字Materials Science Forum
號碼PART 1
505-507
ISSN(列印)0255-5476
ISSN(電子)1662-9752

Other

Other2005 International Conference on Advanced Manufacture, ICAM2005
國家/地區Taiwan
城市Taipei, R.O.C.
期間05-11-2805-12-02

All Science Journal Classification (ASJC) codes

  • 一般材料科學
  • 凝聚態物理學
  • 材料力學
  • 機械工業

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