Performance evaluation of a lead-titanate (PbTiO3) pyroelectric thin-film infrared sensor with temperature isolation improvement structure by Micro-electro-mechanical system (MEMS) technologies

Jyh Jier Ho, Y. K. Fang, C. Y. Chen, G. S. Chen, Ming-Shaung Ju

研究成果: Conference article同行評審

摘要

An infrared (IR) sensor with the lead-titanate (PbTiO3) thin-film using the technology of micro-eletro-mechanical systems to achieve a better thermal isolation structure has been fabricated and developed. The major IR-sensing part on the cantilever beam with dimensions of 200 × 100 × 2 μm3 consists of a 500-Å PbTiO3 layer deposited by RF sputtering, and an evaporated bismuth (Bi) layer. This thermal isolation improved structure exhibits a much superior performance to that of a traditional IR-sensing bulk structure on the experimental results, which show a 200% and 300% improvement in current gain under the incident optical power 500 μW and 6 V applied bias at room temperature and 77°K, respectively.

原文English
頁(從 - 到)236-243
頁數8
期刊Proceedings of SPIE - The International Society for Optical Engineering
3419
DOIs
出版狀態Published - 1998 十二月 1
事件Optoelectronic Materials and Devices - Taipei, Taiwan
持續時間: 1998 七月 91998 七月 11

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 凝聚態物理學
  • 電腦科學應用
  • 應用數學
  • 電氣與電子工程

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