Performance improvement of Y-doped VOx microbolometers with nanomesh antireflection layer

Tsung Han Yeh, Cheng Kang Tsai, Shao Yu Chu, Hsin Ying Lee, Ching Ting Lee

研究成果: Article

1 引文 斯高帕斯(Scopus)

摘要

In the study, the yttrium (Y)-doped vanadium oxide (VOx:Y) films used as the sensitive layers of microbolometers were deposited using a radio frequency magnetron cosputtering system. The temperature coefficient of resistance (TCR) of the VOx:Y films was enhanced from 1.88%/°C to 2.85%/°C in comparison with that of the VOx films. To further improve the performance of microbolometers, the nanomesh antireflection layer was placed on the top surface of the microbolometers to reduce the infrared reflection. The responsivity, thermal time constant, thermal conductivity, absorptance, and detectivity of the VOx:Y microbolometers with nanomesh antireflection layer were 931.89-48 kV/W, 4.48 ms, 6.19-108 W/K, 74.41% and 2.20-108 cmHz0.5W1, respectively.

原文English
頁(從 - 到)6433-6442
頁數10
期刊Optics Express
28
發行號5
DOIs
出版狀態Published - 2020 三月 2

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

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