Performance improvement of Zn0.5Mg0.5O UV sensor by supercritical fluid technology

Ya Ting Chien; Hong Yi Tu; Wen Chung Chen; Yu Zhe Zheng; Sheng Yao Chou; Pei Jun Sun; Xin Ying Tsai; Liu Wen Chang; Ming Chi Chou; Tsung Ming Tsai

doi:10.1016/j.mssp.2023.107343

Performance improvement of Zn_0.5Mg_0.5O UV sensor by supercritical fluid technology

Ya Ting Chien
, Hong Yi Tu
, Wen Chung Chen
, Yu Zhe Zheng
, Sheng Yao Chou
, Pei Jun Sun
, Xin Ying Tsai
, Liu Wen Chang
, Ming Chi Chou
, Tsung Ming Tsai

關鍵材料學位學程

研究成果: Article › 同行評審

摘要

Supercritical carbon dioxide (SCCO₂) fluids technology is utilized to improve the performance of Zn_0.5Mg_0.5O deep-ultraviolet (DUV) sensor with metal–semiconductor-metal (MSM) structure in this study. The sensitivity of the device can be enhanced double after SCCO₂ fluids treatment. The performance improvement is attributed to the passivation of the interface and the bulk defects resulting from device fabrication process. Based on the material analysis, the oxygen vacancies are reduced after SCCO₂ fluids treatment, which demonstrates these defects can be passivated. This study proposes a potential technology for SCCO₂ fluids to improve the performance of MSM-type Zn_0.5Mg_0.5O DUV sensor at low temperatures.

原文	English
文章編號	107343
期刊	Materials Science in Semiconductor Processing
卷	158
DOIs	https://doi.org/10.1016/j.mssp.2023.107343
出版狀態	Published - 2023 5月

All Science Journal Classification (ASJC) codes

一般材料科學
凝聚態物理學
材料力學
機械工業

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10.1016/j.mssp.2023.107343

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引用此

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title = "Performance improvement of Zn0.5Mg0.5O UV sensor by supercritical fluid technology",

abstract = "Supercritical carbon dioxide (SCCO2) fluids technology is utilized to improve the performance of Zn0.5Mg0.5O deep-ultraviolet (DUV) sensor with metal–semiconductor-metal (MSM) structure in this study. The sensitivity of the device can be enhanced double after SCCO2 fluids treatment. The performance improvement is attributed to the passivation of the interface and the bulk defects resulting from device fabrication process. Based on the material analysis, the oxygen vacancies are reduced after SCCO2 fluids treatment, which demonstrates these defects can be passivated. This study proposes a potential technology for SCCO2 fluids to improve the performance of MSM-type Zn0.5Mg0.5O DUV sensor at low temperatures.",

author = "Chien, \{Ya Ting\} and Tu, \{Hong Yi\} and Chen, \{Wen Chung\} and Zheng, \{Yu Zhe\} and Chou, \{Sheng Yao\} and Sun, \{Pei Jun\} and Tsai, \{Xin Ying\} and Chang, \{Liu Wen\} and Chou, \{Ming Chi\} and Tsai, \{Tsung Ming\}",

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year = "2023",

month = may,

doi = "10.1016/j.mssp.2023.107343",

language = "English",

volume = "158",

journal = "Materials Science in Semiconductor Processing",

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T1 - Performance improvement of Zn0.5Mg0.5O UV sensor by supercritical fluid technology

AU - Chien, Ya Ting

AU - Tu, Hong Yi

AU - Chen, Wen Chung

AU - Zheng, Yu Zhe

AU - Chou, Sheng Yao

AU - Sun, Pei Jun

AU - Tsai, Xin Ying

AU - Chang, Liu Wen

AU - Chou, Ming Chi

AU - Tsai, Tsung Ming

PY - 2023/5

Y1 - 2023/5

N2 - Supercritical carbon dioxide (SCCO2) fluids technology is utilized to improve the performance of Zn0.5Mg0.5O deep-ultraviolet (DUV) sensor with metal–semiconductor-metal (MSM) structure in this study. The sensitivity of the device can be enhanced double after SCCO2 fluids treatment. The performance improvement is attributed to the passivation of the interface and the bulk defects resulting from device fabrication process. Based on the material analysis, the oxygen vacancies are reduced after SCCO2 fluids treatment, which demonstrates these defects can be passivated. This study proposes a potential technology for SCCO2 fluids to improve the performance of MSM-type Zn0.5Mg0.5O DUV sensor at low temperatures.

AB - Supercritical carbon dioxide (SCCO2) fluids technology is utilized to improve the performance of Zn0.5Mg0.5O deep-ultraviolet (DUV) sensor with metal–semiconductor-metal (MSM) structure in this study. The sensitivity of the device can be enhanced double after SCCO2 fluids treatment. The performance improvement is attributed to the passivation of the interface and the bulk defects resulting from device fabrication process. Based on the material analysis, the oxygen vacancies are reduced after SCCO2 fluids treatment, which demonstrates these defects can be passivated. This study proposes a potential technology for SCCO2 fluids to improve the performance of MSM-type Zn0.5Mg0.5O DUV sensor at low temperatures.

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UR - https://www.scopus.com/pages/publications/85147325065#tab=citedBy

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DO - 10.1016/j.mssp.2023.107343

M3 - Article

AN - SCOPUS:85147325065

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VL - 158

JO - Materials Science in Semiconductor Processing

JF - Materials Science in Semiconductor Processing

M1 - 107343

ER -

Performance improvement of Zn0.5Mg0.5O UV sensor by supercritical fluid technology

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Performance improvement of Zn_0.5Mg_0.5O UV sensor by supercritical fluid technology