Perspective on the development of microplasma technology: The role of oxygen in downstream microwave plasma
Y. T. Wu, J. D. Liao, C. C. Weng, M. C. Wang, J. E. Chang, C. H. Chen, M. Zharnikov
研究成果: Article › 同行評審
4
引文
斯高帕斯(Scopus)