Phase-modulated 3D-hierarchical 1T/2H WSe2 nanoscrews by a plasma-assisted selenization process as high performance NO gas sensors with a ppb-level detection limit

Yu Ze Chen, Shao Hsin Lee, Teng Yu Su, Shu Chi Wu, Pin Jung Chen, Yu Lun Chueh

研究成果: Article

摘要

In this work, we create plasma-engineered-1T/2H 3D-hierarchical WSe2 nanoscrews derived from WOx 3D-hierarchical nanoscrews through a low-temperature plasma-assisted selenization process with controlled shapes grown using a glancing angle deposition (GLAD) system. Through a detailed investigation of chemical bonding in WSe2 by XPS and TEM, it was found that hybrids of 1T and 2H phases can be engineered, depending on substrate temperatures under plasma treatment. The GLAD system was exploited to achieve 1D nanostructures to enhance the surface-area-to-volume ratio compared to that of flat films, thus increasing the capacity for sensing applications. Here, WSe2 was chosen as the best sensing material for nitric oxide (NO) gas detection because of its p-type semiconducting properties and effective charge transfer with NO molecules. The performance of WSe2 nanoscrew gas sensors which was closely associated with 1T-2H phases was investigated where the barrier height decreased by the heterojunction of 1T/2H phases in WSe2 exhibiting the best sensing capability at a ratio of 0.41 between 1T and 2H phases was found. The plasma-engineered-1T/2H WSe2 3D-hierarchical nanoscrews exhibited a highly sensitive performance with a response over 40% at 60 ppb at room temperature with a detection limit of approximately ∼15 ppb. Finally, ∼100% response in air using the plasma-engineered-1T/2H WSe2 3D-hierarchical nanoscrews was demonstrated, proving their potential for application as next-generation high-performance gas sensors.

原文English
頁(從 - 到)22314-22322
頁數9
期刊Journal of Materials Chemistry A
7
發行號39
DOIs
出版狀態Published - 2019 一月 1

指紋

Nitric oxide
Chemical sensors
Nitric Oxide
Plasmas
Temperature
Heterojunctions
Charge transfer
Nanostructures
X ray photoelectron spectroscopy
Gases
Transmission electron microscopy
Molecules
Substrates
Air

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Renewable Energy, Sustainability and the Environment
  • Materials Science(all)

引用此文

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title = "Phase-modulated 3D-hierarchical 1T/2H WSe2 nanoscrews by a plasma-assisted selenization process as high performance NO gas sensors with a ppb-level detection limit",
abstract = "In this work, we create plasma-engineered-1T/2H 3D-hierarchical WSe2 nanoscrews derived from WOx 3D-hierarchical nanoscrews through a low-temperature plasma-assisted selenization process with controlled shapes grown using a glancing angle deposition (GLAD) system. Through a detailed investigation of chemical bonding in WSe2 by XPS and TEM, it was found that hybrids of 1T and 2H phases can be engineered, depending on substrate temperatures under plasma treatment. The GLAD system was exploited to achieve 1D nanostructures to enhance the surface-area-to-volume ratio compared to that of flat films, thus increasing the capacity for sensing applications. Here, WSe2 was chosen as the best sensing material for nitric oxide (NO) gas detection because of its p-type semiconducting properties and effective charge transfer with NO molecules. The performance of WSe2 nanoscrew gas sensors which was closely associated with 1T-2H phases was investigated where the barrier height decreased by the heterojunction of 1T/2H phases in WSe2 exhibiting the best sensing capability at a ratio of 0.41 between 1T and 2H phases was found. The plasma-engineered-1T/2H WSe2 3D-hierarchical nanoscrews exhibited a highly sensitive performance with a response over 40{\%} at 60 ppb at room temperature with a detection limit of approximately ∼15 ppb. Finally, ∼100{\%} response in air using the plasma-engineered-1T/2H WSe2 3D-hierarchical nanoscrews was demonstrated, proving their potential for application as next-generation high-performance gas sensors.",
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Phase-modulated 3D-hierarchical 1T/2H WSe2 nanoscrews by a plasma-assisted selenization process as high performance NO gas sensors with a ppb-level detection limit. / Chen, Yu Ze; Lee, Shao Hsin; Su, Teng Yu; Wu, Shu Chi; Chen, Pin Jung; Chueh, Yu Lun.

於: Journal of Materials Chemistry A, 卷 7, 編號 39, 01.01.2019, p. 22314-22322.

研究成果: Article

TY - JOUR

T1 - Phase-modulated 3D-hierarchical 1T/2H WSe2 nanoscrews by a plasma-assisted selenization process as high performance NO gas sensors with a ppb-level detection limit

AU - Chen, Yu Ze

AU - Lee, Shao Hsin

AU - Su, Teng Yu

AU - Wu, Shu Chi

AU - Chen, Pin Jung

AU - Chueh, Yu Lun

PY - 2019/1/1

Y1 - 2019/1/1

N2 - In this work, we create plasma-engineered-1T/2H 3D-hierarchical WSe2 nanoscrews derived from WOx 3D-hierarchical nanoscrews through a low-temperature plasma-assisted selenization process with controlled shapes grown using a glancing angle deposition (GLAD) system. Through a detailed investigation of chemical bonding in WSe2 by XPS and TEM, it was found that hybrids of 1T and 2H phases can be engineered, depending on substrate temperatures under plasma treatment. The GLAD system was exploited to achieve 1D nanostructures to enhance the surface-area-to-volume ratio compared to that of flat films, thus increasing the capacity for sensing applications. Here, WSe2 was chosen as the best sensing material for nitric oxide (NO) gas detection because of its p-type semiconducting properties and effective charge transfer with NO molecules. The performance of WSe2 nanoscrew gas sensors which was closely associated with 1T-2H phases was investigated where the barrier height decreased by the heterojunction of 1T/2H phases in WSe2 exhibiting the best sensing capability at a ratio of 0.41 between 1T and 2H phases was found. The plasma-engineered-1T/2H WSe2 3D-hierarchical nanoscrews exhibited a highly sensitive performance with a response over 40% at 60 ppb at room temperature with a detection limit of approximately ∼15 ppb. Finally, ∼100% response in air using the plasma-engineered-1T/2H WSe2 3D-hierarchical nanoscrews was demonstrated, proving their potential for application as next-generation high-performance gas sensors.

AB - In this work, we create plasma-engineered-1T/2H 3D-hierarchical WSe2 nanoscrews derived from WOx 3D-hierarchical nanoscrews through a low-temperature plasma-assisted selenization process with controlled shapes grown using a glancing angle deposition (GLAD) system. Through a detailed investigation of chemical bonding in WSe2 by XPS and TEM, it was found that hybrids of 1T and 2H phases can be engineered, depending on substrate temperatures under plasma treatment. The GLAD system was exploited to achieve 1D nanostructures to enhance the surface-area-to-volume ratio compared to that of flat films, thus increasing the capacity for sensing applications. Here, WSe2 was chosen as the best sensing material for nitric oxide (NO) gas detection because of its p-type semiconducting properties and effective charge transfer with NO molecules. The performance of WSe2 nanoscrew gas sensors which was closely associated with 1T-2H phases was investigated where the barrier height decreased by the heterojunction of 1T/2H phases in WSe2 exhibiting the best sensing capability at a ratio of 0.41 between 1T and 2H phases was found. The plasma-engineered-1T/2H WSe2 3D-hierarchical nanoscrews exhibited a highly sensitive performance with a response over 40% at 60 ppb at room temperature with a detection limit of approximately ∼15 ppb. Finally, ∼100% response in air using the plasma-engineered-1T/2H WSe2 3D-hierarchical nanoscrews was demonstrated, proving their potential for application as next-generation high-performance gas sensors.

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