Phase transformation of tantalum on different dielectric films with plasma treatment

Chun Chieh Huang, Ying Lang Wang, Shih Chieh Chang, Gwo Jen Hwang, Jow Lay Huang

研究成果: Conference article同行評審

4 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Physics & Astronomy

Chemical Compounds