TY - GEN
T1 - Photo-electronic properties of titanium dioxide nano thin films
AU - Tu, Sheng Lung
AU - Su, Yen Hsun
AU - Shen, Yun Hwei
AU - Ray, Dah Tong
AU - Wu, Yu Chun
AU - Chen, Tao Hsing
N1 - Copyright:
Copyright 2014 Elsevier B.V., All rights reserved.
PY - 2014
Y1 - 2014
N2 - In this study, nano-titanium films of different thickness were deposited. By adjusting it is found that when the thickness of the titanium films was in the nano-scale, the electric resistivity of the titanium films decreased. Furthermore, the deposited titanium was transformed into titanium oxide by maintain an oxygen atmosphere and using a rapid annealing furnace during sputtering. When oxidized nano titanium film is sputtered on a low-electric-resistive metal thin film, the photo-electronic properties of Nano-thin film will be enhanced.
AB - In this study, nano-titanium films of different thickness were deposited. By adjusting it is found that when the thickness of the titanium films was in the nano-scale, the electric resistivity of the titanium films decreased. Furthermore, the deposited titanium was transformed into titanium oxide by maintain an oxygen atmosphere and using a rapid annealing furnace during sputtering. When oxidized nano titanium film is sputtered on a low-electric-resistive metal thin film, the photo-electronic properties of Nano-thin film will be enhanced.
UR - http://www.scopus.com/inward/record.url?scp=84891131109&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84891131109&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/AMM.479-480.50
DO - 10.4028/www.scientific.net/AMM.479-480.50
M3 - Conference contribution
AN - SCOPUS:84891131109
SN - 9783037859476
T3 - Applied Mechanics and Materials
SP - 50
EP - 54
BT - Applied Science and Precision Engineering Innovation
T2 - International Applied Science and Precision Engineering Conference 2013, ASPEC 2013
Y2 - 18 October 2013 through 22 October 2013
ER -