Physical and structural properties of RF magnetron sputtered ZnO films

Ren Chuan Chang, Sheng Vuan Chu, Kuang Yao Lo, Shih Chieh Lo, Yi Ren Huang

研究成果: Conference article同行評審

12 引文 斯高帕斯(Scopus)


Poly-crystal zinc oxide thin films with c-axis orientation have been successfully grown on the silicon substrate by r.f. magnetron sputtering technique. A systematic study has been made of the influence of substrate temperature on the film structural and optical properties. For SAW device applications, it is necessary for ZnO films to have c-axis oriented crystalline structure. Much lower FWHM values 0.24° is obtained under the substrate temperature at 100°C for gaining effective electromechanical coupling. Crystalline structures, stress, and surface morphology characteristics of the films were investigated by X-ray diffraction, scanning electron microscopy. Reflective Second Harmonic Generation was used to analyze the quality of the ZnO film, and the results from these ZnO films coincide with the X-ray pattern and SEM image. Optical transmittance measurements were carried out by UV-visible spectrophotometer.

頁(從 - 到)43-53
期刊Integrated Ferroelectrics
出版狀態Published - 2005
事件16th International Symposium on Integrated Ferroelectrics, ISIF-16 - Gyeongju, Korea, Republic of
持續時間: 2004 4月 52004 4月 8

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 控制與系統工程
  • 陶瓷和複合材料
  • 凝聚態物理學
  • 電氣與電子工程
  • 材料化學


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