Piezoelectric actuator design with micro positioning capability and it's practical implementation: Fuzzy approach

研究成果: Conference contribution

摘要

Due to the developments of precision industrial machineries, the microscale positioning ability for the relative apparatus requires small size and high accuracy, and the piezoelectric actuator is one of means has this feature hence piezoelectric actuator plays an important role in this field for its microscale movement ability. Unfortunately, the nonlinear hysteresis phenomenon of piezoelectric materials, and modeling uncertainties of piezoelectric actuators lead to control difficulties and strongly reduce the positioning accuracy of piezoelectric actuators. Based on the above reasons, a novel control design combined with feedback linearization, fuzzy modeling approximation, and robust control concept are proposed for dealing with the micrometer (μm) positioning problem of piezoelectric actuators. From the simulation results, it is obvious that our proposed control law yields the excellent control performance than the conventional control designs. Finally, this proposed method is practically performed for the verification of positioning performance. After the practical testing, the controlled piezoelectric actuator possesses a positioning accuracy of 1 μm.

原文English
主出版物標題iFUZZY 2013 - 2013 International Conference on Fuzzy Theory and Its Applications
發行者IEEE Computer Society
頁面19-24
頁數6
ISBN(列印)9781479903863
DOIs
出版狀態Published - 2013 一月 1
事件iFUZZY 2013 - 2013 International Conference on Fuzzy Theory and Its Applications - Taipei, Taiwan
持續時間: 2013 十二月 62013 十二月 8

出版系列

名字iFUZZY 2013 - 2013 International Conference on Fuzzy Theory and Its Applications

Other

OtheriFUZZY 2013 - 2013 International Conference on Fuzzy Theory and Its Applications
國家Taiwan
城市Taipei
期間13-12-0613-12-08

指紋

Piezoelectric Actuator
Piezoelectric actuators
Positioning
Control Design
Uncertainty Modeling
Piezoelectric Material
Feedback Linearization
Feedback linearization
Fuzzy Modeling
Piezoelectric materials
Robust control
Robust Control
Hysteresis
Design
High Accuracy
Testing
Approximation
Simulation

All Science Journal Classification (ASJC) codes

  • Applied Mathematics

引用此文

Chen, Y-Y. (2013). Piezoelectric actuator design with micro positioning capability and it's practical implementation: Fuzzy approach. 於 iFUZZY 2013 - 2013 International Conference on Fuzzy Theory and Its Applications (頁 19-24). [6825403] (iFUZZY 2013 - 2013 International Conference on Fuzzy Theory and Its Applications). IEEE Computer Society. https://doi.org/10.1109/iFuzzy.2013.6825403
Chen, Yung-Yu. / Piezoelectric actuator design with micro positioning capability and it's practical implementation : Fuzzy approach. iFUZZY 2013 - 2013 International Conference on Fuzzy Theory and Its Applications. IEEE Computer Society, 2013. 頁 19-24 (iFUZZY 2013 - 2013 International Conference on Fuzzy Theory and Its Applications).
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abstract = "Due to the developments of precision industrial machineries, the microscale positioning ability for the relative apparatus requires small size and high accuracy, and the piezoelectric actuator is one of means has this feature hence piezoelectric actuator plays an important role in this field for its microscale movement ability. Unfortunately, the nonlinear hysteresis phenomenon of piezoelectric materials, and modeling uncertainties of piezoelectric actuators lead to control difficulties and strongly reduce the positioning accuracy of piezoelectric actuators. Based on the above reasons, a novel control design combined with feedback linearization, fuzzy modeling approximation, and robust control concept are proposed for dealing with the micrometer (μm) positioning problem of piezoelectric actuators. From the simulation results, it is obvious that our proposed control law yields the excellent control performance than the conventional control designs. Finally, this proposed method is practically performed for the verification of positioning performance. After the practical testing, the controlled piezoelectric actuator possesses a positioning accuracy of 1 μm.",
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Chen, Y-Y 2013, Piezoelectric actuator design with micro positioning capability and it's practical implementation: Fuzzy approach. 於 iFUZZY 2013 - 2013 International Conference on Fuzzy Theory and Its Applications., 6825403, iFUZZY 2013 - 2013 International Conference on Fuzzy Theory and Its Applications, IEEE Computer Society, 頁 19-24, iFUZZY 2013 - 2013 International Conference on Fuzzy Theory and Its Applications, Taipei, Taiwan, 13-12-06. https://doi.org/10.1109/iFuzzy.2013.6825403

Piezoelectric actuator design with micro positioning capability and it's practical implementation : Fuzzy approach. / Chen, Yung-Yu.

iFUZZY 2013 - 2013 International Conference on Fuzzy Theory and Its Applications. IEEE Computer Society, 2013. p. 19-24 6825403 (iFUZZY 2013 - 2013 International Conference on Fuzzy Theory and Its Applications).

研究成果: Conference contribution

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Chen Y-Y. Piezoelectric actuator design with micro positioning capability and it's practical implementation: Fuzzy approach. 於 iFUZZY 2013 - 2013 International Conference on Fuzzy Theory and Its Applications. IEEE Computer Society. 2013. p. 19-24. 6825403. (iFUZZY 2013 - 2013 International Conference on Fuzzy Theory and Its Applications). https://doi.org/10.1109/iFuzzy.2013.6825403