Plasma-driven system circuit design with asymmetrical pulsewidth modulation scheme

Fu Sheng Pai, Chung Lun Ou, Shyh Jier Huang

研究成果: Article同行評審

16 引文 斯高帕斯(Scopus)

摘要

In this paper, the circuit design of a resonant inverter for plasma-driven system is studied. Based on the half-bridge inverter structure, the proposed circuit has included the soft-switching techniques so that the investment on heat dissipation can be greatly saved. Moreover, this paper has investigated plasma power control under different conditions. Via the developed control circuit to formulate the relationships between the output power and voltage as a quadratic function, the output power of the system can then be controlled and becomes insensitive to plasma voltage variations. In order to solidify the practicality of this circuit design, mathematical analyses and experimental validations have been thoroughly performed. Test results help confirm the effectiveness of the method, demonstrating its feasibility and practicality for high-frequency-drive industry applications.

原文English
文章編號5639074
頁(從 - 到)4167-4174
頁數8
期刊IEEE Transactions on Industrial Electronics
58
發行號9
DOIs
出版狀態Published - 2011 九月

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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