TY - JOUR
T1 - Plasma enhanced chemical vapor deposition silicon nitride for a high-performance lithium ion battery anode
AU - Yang, Jinho
AU - De Guzman, Rhet C.
AU - Salley, Steven O.
AU - Ng, K. Y.Simon
AU - Chen, Bing Hung
AU - Cheng, Mark Ming Cheng
N1 - Funding Information:
The authors would like to thank Dan Durisin and Bill Funk for their assistances using nFab facility, Chris Thrush for the access of XPS, Li Li for AFM imaging, and TESCAN Inc for the access of FIB and TEM. The financial supports from WSU , NSF (# 1229635 ), DOE and Richard Barber Foundation are gratefully acknowledged.
PY - 2014/12/10
Y1 - 2014/12/10
N2 - Silicon nitride thin films deposited by plasma enhanced chemical vapor deposition (PECVD) were evaluated for their performance as lithium ion battery anodes. PECVD is a mature technique in the semiconductor industry, but has been less utilized in battery research. We show that PECVD is a powerful tool to control the chemical composition of battery materials and its corresponding specific capacity. A 250 nm nitride anode was shown to have a stable reversible capacity of 1800 mAh g-1 with 86% capacity retention after 300 cycles. The capacity dropped for thicker films (1 μm), where it retained 76% after 100 cycles. The high reversible capacity of the PECVD nitride anode was attributable to a conductive Li3N matrix and excellent adhesion between PECVD films and copper current collectors.
AB - Silicon nitride thin films deposited by plasma enhanced chemical vapor deposition (PECVD) were evaluated for their performance as lithium ion battery anodes. PECVD is a mature technique in the semiconductor industry, but has been less utilized in battery research. We show that PECVD is a powerful tool to control the chemical composition of battery materials and its corresponding specific capacity. A 250 nm nitride anode was shown to have a stable reversible capacity of 1800 mAh g-1 with 86% capacity retention after 300 cycles. The capacity dropped for thicker films (1 μm), where it retained 76% after 100 cycles. The high reversible capacity of the PECVD nitride anode was attributable to a conductive Li3N matrix and excellent adhesion between PECVD films and copper current collectors.
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U2 - 10.1016/j.jpowsour.2014.06.135
DO - 10.1016/j.jpowsour.2014.06.135
M3 - Article
AN - SCOPUS:84904971885
SN - 0378-7753
VL - 269
SP - 520
EP - 525
JO - Journal of Power Sources
JF - Journal of Power Sources
ER -