Plasma treatment on the plastic substrates for liquid phase deposited SiO2 films for flexible electronics applications

Yu Ju Lin, Chih Chieh Yeh, Li Ming Huang, Ten Chin Wen, Yeong Her Wang

研究成果: Conference contribution

摘要

Liquid phase deposition (LPD) method to grow the silicon dioxide interlayer on the PES plastic substrates with the O2/Ar plasma pre-treatment is investigated. After which, the interlayer on the plastic substrates is grown and the films' quality on the substrates with or without the plasma pre-treatment is examined by using scanning electron microscopy, etching rate of the oxide layer by the diluted HF solution and surface leakage current measurement. The pentacene-based organic thin film transistors on the dielectric layers suitable for flexible electronics applications are demonstrated.

原文English
主出版物標題ICSICT-2006
主出版物子標題2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings
發行者IEEE Computer Society
頁面893-895
頁數3
ISBN(列印)1424401615, 9781424401611
DOIs
出版狀態Published - 2006 一月 1
事件ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology - Shanghai, China
持續時間: 2006 十月 232006 十月 26

出版系列

名字ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings

Other

OtherICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology
國家China
城市Shanghai
期間06-10-2306-10-26

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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