@inproceedings{da0851046a82453fb2fb7cda6d2f9b25,
title = "Plasma treatment on the plastic substrates for liquid phase deposited SiO2 films for flexible electronics applications",
abstract = "Liquid phase deposition (LPD) method to grow the silicon dioxide interlayer on the PES plastic substrates with the O2/Ar plasma pre-treatment is investigated. After which, the interlayer on the plastic substrates is grown and the films' quality on the substrates with or without the plasma pre-treatment is examined by using scanning electron microscopy, etching rate of the oxide layer by the diluted HF solution and surface leakage current measurement. The pentacene-based organic thin film transistors on the dielectric layers suitable for flexible electronics applications are demonstrated.",
author = "Lin, \{Yu Ju\} and Yeh, \{Chih Chieh\} and Huang, \{Li Ming\} and Wen, \{Ten Chin\} and Wang, \{Yeong Her\}",
year = "2006",
month = jan,
day = "1",
doi = "10.1109/ICSICT.2006.306563",
language = "English",
isbn = "1424401615",
series = "ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings",
publisher = "IEEE Computer Society",
pages = "893--895",
booktitle = "ICSICT-2006",
address = "United States",
note = "ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology ; Conference date: 23-10-2006 Through 26-10-2006",
}