Power MEMS and microengines

A. H. Epstein, S. D. Senturia, G. Anathasuresh, A. Ayon, K. Breuer, K. S. Chen, F. E. Ehrich, G. Gauba, R. Ghodssi, C. Groshenry, S. Jacobson, J. H. Lang, C. C. Lin, A. Mehra, J. M. Miranda, al et al

研究成果: Paper同行評審

163 引文 斯高帕斯(Scopus)

摘要

MIT is developing a MEMS-based gas turbine generator. Based on high speed rotating machinery, this 1 cm diameter by 3 mm thick SiC heat engine is designed to produce 10-20 W of electric power while consuming 10 grams/hr of H2. Later versions may produce up to 100 W using hydrocarbon fuels. The combustor is now operating and an 80 W micro-turbine has been fabricated and is being tested. This engine can be considered the first of a new class of MEMS device, power MEMS, which are heat engines operating at power densities similar to those of the best large scale devices made today.

原文English
頁面753-756
頁數4
出版狀態Published - 1997
事件Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2) - Chicago, IL, USA
持續時間: 1997 六月 161997 六月 19

Other

OtherProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2)
城市Chicago, IL, USA
期間97-06-1697-06-19

All Science Journal Classification (ASJC) codes

  • 工程 (全部)

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