Power MEMS and microengines

A. H. Epstein; S. D. Senturia; G. Anathasuresh; A. Ayon; K. Breuer; K. S. Chen; F. E. Ehrich; G. Gauba; R. Ghodssi; C. Groshenry; S. Jacobson; J. H. Lang; C. C. Lin; A. Mehra; J. M. Miranda; al et al

Power MEMS and microengines

A. H. Epstein, S. D. Senturia, G. Anathasuresh, A. Ayon, K. Breuer, K. S. Chen, F. E. Ehrich, G. Gauba, R. Ghodssi, C. Groshenry, S. Jacobson, J. H. Lang, C. C. Lin, A. Mehra, J. M. Miranda, al et al

機械工程學系

研究成果: Paper › 同行評審

182 引文斯高帕斯（Scopus）

摘要

MIT is developing a MEMS-based gas turbine generator. Based on high speed rotating machinery, this 1 cm diameter by 3 mm thick SiC heat engine is designed to produce 10-20 W of electric power while consuming 10 grams/hr of H₂. Later versions may produce up to 100 W using hydrocarbon fuels. The combustor is now operating and an 80 W micro-turbine has been fabricated and is being tested. This engine can be considered the first of a new class of MEMS device, power MEMS, which are heat engines operating at power densities similar to those of the best large scale devices made today.

原文	English
頁面	753-756
頁數	4
出版狀態	Published - 1997
事件	Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2) - Chicago, IL, USA 持續時間: 1997 6月 16 → 1997 6月 19

Other

Other	Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2)
城市	Chicago, IL, USA
期間	97-06-16 → 97-06-19

All Science Journal Classification (ASJC) codes

工程 (全部)

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Epstein, A. H., Senturia, S. D., Anathasuresh, G., Ayon, A., Breuer, K., Chen, K. S., Ehrich, F. E., Gauba, G., Ghodssi, R., Groshenry, C., Jacobson, S., Lang, J. H., Lin, C. C., Mehra, A., Miranda, J. M., & et al, A. (1997). Power MEMS and microengines. 753-756. 論文發表於 Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2), Chicago, IL, USA.

@conference{e8fbeaefd512416f9e3bb74a91aa86cb,

title = "Power MEMS and microengines",

abstract = "MIT is developing a MEMS-based gas turbine generator. Based on high speed rotating machinery, this 1 cm diameter by 3 mm thick SiC heat engine is designed to produce 10-20 W of electric power while consuming 10 grams/hr of H2. Later versions may produce up to 100 W using hydrocarbon fuels. The combustor is now operating and an 80 W micro-turbine has been fabricated and is being tested. This engine can be considered the first of a new class of MEMS device, power MEMS, which are heat engines operating at power densities similar to those of the best large scale devices made today.",

author = "Epstein, {A. H.} and Senturia, {S. D.} and G. Anathasuresh and A. Ayon and K. Breuer and Chen, {K. S.} and Ehrich, {F. E.} and G. Gauba and R. Ghodssi and C. Groshenry and S. Jacobson and Lang, {J. H.} and Lin, {C. C.} and A. Mehra and Miranda, {J. M.} and {et al}, al",

year = "1997",

language = "English",

pages = "753--756",

note = "Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2) ; Conference date: 16-06-1997 Through 19-06-1997",

}

Epstein, AH, Senturia, SD, Anathasuresh, G, Ayon, A, Breuer, K, Chen, KS, Ehrich, FE, Gauba, G, Ghodssi, R, Groshenry, C, Jacobson, S, Lang, JH, Lin, CC, Mehra, A, Miranda, JM & et al, A 1997, 'Power MEMS and microengines', 論文發表於 Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2), Chicago, IL, USA, 97-06-16 - 97-06-19 頁 753-756.

TY - CONF

T1 - Power MEMS and microengines

AU - Epstein, A. H.

AU - Senturia, S. D.

AU - Anathasuresh, G.

AU - Ayon, A.

AU - Breuer, K.

AU - Chen, K. S.

AU - Ehrich, F. E.

AU - Gauba, G.

AU - Ghodssi, R.

AU - Groshenry, C.

AU - Jacobson, S.

AU - Lang, J. H.

AU - Lin, C. C.

AU - Mehra, A.

AU - Miranda, J. M.

AU - et al, al

PY - 1997

Y1 - 1997

N2 - MIT is developing a MEMS-based gas turbine generator. Based on high speed rotating machinery, this 1 cm diameter by 3 mm thick SiC heat engine is designed to produce 10-20 W of electric power while consuming 10 grams/hr of H2. Later versions may produce up to 100 W using hydrocarbon fuels. The combustor is now operating and an 80 W micro-turbine has been fabricated and is being tested. This engine can be considered the first of a new class of MEMS device, power MEMS, which are heat engines operating at power densities similar to those of the best large scale devices made today.

AB - MIT is developing a MEMS-based gas turbine generator. Based on high speed rotating machinery, this 1 cm diameter by 3 mm thick SiC heat engine is designed to produce 10-20 W of electric power while consuming 10 grams/hr of H2. Later versions may produce up to 100 W using hydrocarbon fuels. The combustor is now operating and an 80 W micro-turbine has been fabricated and is being tested. This engine can be considered the first of a new class of MEMS device, power MEMS, which are heat engines operating at power densities similar to those of the best large scale devices made today.

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UR - http://www.scopus.com/inward/citedby.url?scp=0030710904&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:0030710904

SP - 753

EP - 756

T2 - Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2)

Y2 - 16 June 1997 through 19 June 1997

ER -

Power MEMS and microengines

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