Precise autofocusing microscope with rapid response

Chien Sheng Liu, Sheng Hong Jiang

研究成果: Article同行評審

16 引文 斯高帕斯(Scopus)

摘要

The rapid on-line or off-line automated vision inspection is a critical operation in the manufacturing fields. Accordingly, this present study designs and characterizes a novel precise optics-based autofocusing microscope with a rapid response and no reduction in the focusing accuracy. In contrast to conventional optics-based autofocusing microscopes with centroid method, the proposed microscope comprises a high-speed rotating optical diffuser in which the variation of the image centroid position is reduced and consequently the focusing response is improved. The proposed microscope is characterized and verified experimentally using a laboratory-built prototype. The experimental results show that compared to conventional optics-based autofocusing microscopes, the proposed microscope achieves a more rapid response with no reduction in the focusing accuracy. Consequently, the proposed microscope represents another solution for both existing and emerging industrial applications of automated vision inspection.

原文English
頁(從 - 到)294-300
頁數7
期刊Optics and Lasers in Engineering
66
DOIs
出版狀態Published - 2015 三月

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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