Preliminary study of a dynamic-moving-window scheme for virtual-metrology model refreshing

Wei Ming Wu, Fan Tien Cheng, Min Hsiung Hung

研究成果: Conference contribution

1 引文 斯高帕斯(Scopus)

摘要

Virtual Metrology (VM) is a method to conjecture manufacturing quality of a process tool based on data sensed from the process tool and without physical metrology operations. Historical data is used to produce the initial VM models, and then these models are applied to operate in a process drift/shift environment. The accuracy of VM highly depends on the modeling samples adopted during initial-creating and on-line-refreshing periods. Since design-of-experiments (DOE) may not be performed due to large resources required, how could we guarantee stability of the models and predictions when they move into these unknown environments? Conventionally, static-moving-window (SMW) schemes with a fixed window size are adopted during the on-line-refreshing period. The purpose of this paper is to propose a dynamic-moving-window (DMW) scheme for VM model refreshing. The DMW scheme adds a new sample into the model and applies a clustering technology to do similarity clustering. Next, the number of elements in each cluster is checked. If the largest number of elements is greater than the predefined threshold, then the oldest sample in the cluster with the largest population is deleted. Test results show that the DMW scheme has better on-line conjecture accuracy than that of the SMW scheme.

原文English
主出版物標題2012 IEEE International Conference on Robotics and Automation, ICRA 2012
發行者Institute of Electrical and Electronics Engineers Inc.
頁面5044-5049
頁數6
ISBN(列印)9781467314039
DOIs
出版狀態Published - 2012 一月 1
事件 2012 IEEE International Conference on Robotics and Automation, ICRA 2012 - Saint Paul, MN, United States
持續時間: 2012 五月 142012 五月 18

出版系列

名字Proceedings - IEEE International Conference on Robotics and Automation
ISSN(列印)1050-4729

Other

Other 2012 IEEE International Conference on Robotics and Automation, ICRA 2012
國家United States
城市Saint Paul, MN
期間12-05-1412-05-18

    指紋

All Science Journal Classification (ASJC) codes

  • Software
  • Control and Systems Engineering
  • Artificial Intelligence
  • Electrical and Electronic Engineering

引用此

Wu, W. M., Cheng, F. T., & Hung, M. H. (2012). Preliminary study of a dynamic-moving-window scheme for virtual-metrology model refreshing. 於 2012 IEEE International Conference on Robotics and Automation, ICRA 2012 (頁 5044-5049). [6224633] (Proceedings - IEEE International Conference on Robotics and Automation). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICRA.2012.6224633