摘要
Polycrystalline SrTiO3 thin films have been prepared on Timetal substrates by the hydrothermal‐electrochemical method. The films were prepared at temperatures ranging from 100° to 200°C and under saturated vapor pressures in electrolytic solutions of 1N to 5N Sr(OH)2. A galvanostat was used to apply a direct current of 5 to 25 mA/cm2. The films had smooth and homogeneous surfaces without any visible pores or defects. The dielectric constant of the films was approximately 129 assuming 25 nm for film thickness.
| 原文 | English |
|---|---|
| 頁(從 - 到) | 2561-2563 |
| 頁數 | 3 |
| 期刊 | Journal of the American Ceramic Society |
| 卷 | 73 |
| 發行號 | 8 |
| DOIs | |
| 出版狀態 | Published - 1990 8月 |
All Science Journal Classification (ASJC) codes
- 陶瓷和複合材料
- 材料化學
指紋
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