TY - JOUR
T1 - Properties of ZnO-based love mode acoustic filters on 90° rotated ST-cut quartz substrates
AU - Sheng-Yuan, C. H.U.
AU - Water, Walter
AU - Liaw, Jih Tsang
PY - 2003
Y1 - 2003
N2 - Love wave acoustic devices are very suitable for high frequency filters because of their high phase velocity. An experimental study of Love wave devices based on ZnO/90° rotated ST-cut quartz with different thickness of ZnO films is presented. ZnO films with c-axis orientated crystalline structure have been successfully grown on quartz by r.f. sputtering technique. Phase velocity, electromechanical coupling coefficient, and temperature coefficient of frequency have been studied as a function of layer thickness. In this research, ZnO/quartz structure based Love wave acoustic filter not only has higher phase velocity and bigger electromechanical coupling coefficient than quartz substrate, but also keeps the excellent temperature coefficient of frequency.
AB - Love wave acoustic devices are very suitable for high frequency filters because of their high phase velocity. An experimental study of Love wave devices based on ZnO/90° rotated ST-cut quartz with different thickness of ZnO films is presented. ZnO films with c-axis orientated crystalline structure have been successfully grown on quartz by r.f. sputtering technique. Phase velocity, electromechanical coupling coefficient, and temperature coefficient of frequency have been studied as a function of layer thickness. In this research, ZnO/quartz structure based Love wave acoustic filter not only has higher phase velocity and bigger electromechanical coupling coefficient than quartz substrate, but also keeps the excellent temperature coefficient of frequency.
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U2 - 10.1080/10584580390229996
DO - 10.1080/10584580390229996
M3 - Article
AN - SCOPUS:33751293124
SN - 1058-4587
VL - 51
SP - 113
EP - 119
JO - Integrated Ferroelectrics
JF - Integrated Ferroelectrics
ER -